FPM series(Passive-type)

Features

• By applying our bellows rubber to the vibration isolation table, we not only have high vibration isolation characteristics, but also realized miniaturization of the main body of the anti-vibration table and high responsiveness due to thin wall.
• We can also support dedicated design according to customer’s request, such as external tank for low natural frequency adjustment and passive mount activation.

Applications

• Floor vibration reduction of precision equipment
  Semiconductor manufacturing equipment, semiconductor inspection equipment, liquid crystal exposure equipment, precision measuring equipment, precision processing machine, other precision equipment etc.

Specifications

About bellows type air spring

Based on diaphragm manufacturing technology, bellows type air spring which has very thin but high durability has been developed and adopted for our anti-vibration table.

Model designation

Characteristic

■Vibration isolation characteristics in low vertical direction and horizontal direction. Both the vertical direction and the horizontal direction have low natural frequency that is stable low and high vibration isolation characteristics are shown in the high frequency range.