FVH series(Active-type)

FVH series becomes a high load type adopting our bellows type air spring.
It realized high vibration isolation characteristics and thin profile.

Features

The thin film bellows with good respo nse and the large flow rate actuator make it possible to keep the stroke fluctuation to a small value even when the moving stage with a large load moves on the device.
Because it adopts a thin bellows system, it has a thin vibration isolator structure. The FVH – 2400F realized a height of 169 mm[6.65in.] (in neutral). Therefore, it is possible to keep the center of gravity of the equipment to be mounted low.

Applications

Floor vibration reduction of precision equipment
Semiconductor manufacturing equipment, semiconductor inspection equipment, liquid crystal exposure equipment, precision measuring equipment, precision processing machine, other precision equipment etc.

Specifications

About bellows type air spring

Based on diaphragm manufacturing technology, bellows type air spring which has very thin but high durability has been developed and adopted for our anti-vibration table.